diff --git a/cpu/efm32_common/Makefile b/cpu/efm32/Makefile
similarity index 54%
rename from cpu/efm32_common/Makefile
rename to cpu/efm32/Makefile
index 79b967fc6d80823410cd3bbb87c40742711817ef..f70451361e4f292eb0b7684ed7389d1d0a1d9097 100644
--- a/cpu/efm32_common/Makefile
+++ b/cpu/efm32/Makefile
@@ -1,7 +1,6 @@
-# define the module that is build
-MODULE = efm32_common
+MODULE = cpu
 
 # add a list of subdirectories, that should also be build
-DIRS = periph
+DIRS = periph families/$(EFM32_FAMILY) $(RIOTCPU)/cortexm_common
 
 include $(RIOTBASE)/Makefile.base
diff --git a/cpu/efm32_common/Makefile.dep b/cpu/efm32/Makefile.dep
similarity index 50%
rename from cpu/efm32_common/Makefile.dep
rename to cpu/efm32/Makefile.dep
index ac33230682310bc760b760ea072e4469580a476c..9d63028a74ebd98a101dea28adb5a3cff2c24f60 100644
--- a/cpu/efm32_common/Makefile.dep
+++ b/cpu/efm32/Makefile.dep
@@ -1,7 +1,7 @@
 ifneq (,$(filter periph_rtc,$(USEMODULE)))
-  USEMODULE += periph_rtc_series$(CPU_SERIES)
+  USEMODULE += periph_rtc_series$(EFM32_SERIES)
 endif
 
 ifneq (,$(filter periph_rtt,$(USEMODULE)))
-  USEMODULE += periph_rtt_series$(CPU_SERIES)
+  USEMODULE += periph_rtt_series$(EFM32_SERIES)
 endif
diff --git a/cpu/efm32_common/Makefile.features b/cpu/efm32/Makefile.features
similarity index 60%
rename from cpu/efm32_common/Makefile.features
rename to cpu/efm32/Makefile.features
index cfebd4882f694555f8a2c10a91d5667562aa0d03..327743ecc71c662a9b8d8d72401a7e26bc30e76b 100644
--- a/cpu/efm32_common/Makefile.features
+++ b/cpu/efm32/Makefile.features
@@ -1,3 +1,7 @@
 FEATURES_PROVIDED += periph_cpuid
 FEATURES_PROVIDED += periph_flashpage
 FEATURES_PROVIDED += periph_pm
+
+ifeq (1,$(EFM32_TNRG))
+  FEATURES_PROVIDED += periph_hwrng
+endif
diff --git a/cpu/efm32/Makefile.include b/cpu/efm32/Makefile.include
new file mode 100644
index 0000000000000000000000000000000000000000..d27dc50a2e6074e9ca9123b0104c5fc32e9b377e
--- /dev/null
+++ b/cpu/efm32/Makefile.include
@@ -0,0 +1,34 @@
+include $(RIOTCPU)/efm32/efm32-info.mk
+
+export CPU_ARCH = $(EFM32_ARCHITECTURE)
+export CPU_FAM = $(EFM32_FAMILY)
+
+# the em_device.h header requires a global define with the cpu model
+export CFLAGS += -D$(shell echo $(CPU_MODEL) | tr 'a-z' 'A-Z')
+
+# include Gecko SDK package
+USEPKG += gecko_sdk
+
+# CMSIS-DSP is needed for arm_math.h on Cortex-M0+ architectures
+ifeq ($(CPU_ARCH),cortex-m0plus)
+  USEPKG += cmsis-dsp
+endif
+
+# include common periph module
+USEMODULE += periph_common
+
+# include layered power management
+USEMODULE += pm_layered
+
+# include vendor device headers
+INCLUDES += -I$(RIOTCPU)/efm32/families/$(EFM32_FAMILY)/include/vendor
+
+# include cortexm_common
+LINKER_SCRIPT = cortexm.ld
+
+ROM_START_ADDR = $(EFM32_FLASH_START)
+ROM_LEN = $(EFM32_FLASH_SIZE)
+RAM_START_ADDR = $(EFM32_SRAM_START)
+RAM_LEN = $(EFM32_SRAM_SIZE)
+
+include $(RIOTMAKE)/arch/cortexm.inc.mk
diff --git a/cpu/efm32_common/cpu.c b/cpu/efm32/cpu.c
similarity index 99%
rename from cpu/efm32_common/cpu.c
rename to cpu/efm32/cpu.c
index 0421a0bcd22efbbd664614d2f5491d35133af0dd..02e785ba31178e1a169f9dad70d20fea44bf0de9 100644
--- a/cpu/efm32_common/cpu.c
+++ b/cpu/efm32/cpu.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @{
  *
  * @file
diff --git a/cpu/efm32/doc.txt b/cpu/efm32/doc.txt
new file mode 100644
index 0000000000000000000000000000000000000000..86b70aa47d0276f680b83ac61529e09f13a73bec
--- /dev/null
+++ b/cpu/efm32/doc.txt
@@ -0,0 +1,66 @@
+/**
+ * @defgroup        cpu_efm32 Silicon Labs EFM32/EFR32/EZR32
+ * @ingroup         cpu
+ * @brief           Implementation of Silicon Labs's EFM32/EFR32/EZR32 MCUs
+ *
+ * This module contains all code and definitions for the Silicon Labs
+ * EFM32/EFR32/EZR32 MCUs. It uses the Gecko SDK (vendor library) for the
+ * peripheral drivers.
+ *
+ *
+ * Supported Peripherals
+ * =====================
+ *
+ * The following peripherals are supported (depends on microcontroller):
+ *   - ADC
+ *   - CPUID
+ *   - DAC
+ *   - Flash page
+ *   - GPIO
+ *   - HW RNG
+ *   - I2C
+ *   - Power Management
+ *   - PWM
+ *   - RTC
+ *   - RTT
+ *   - SPI
+ *   - Timer
+ *   - UART (including low-power)
+ *
+ *
+ * Clock Configuration
+ * ===================
+ *
+ * By default the microcontroller will run on the internal RC-oscillator. If
+ * an external crystal is available, you can configure it to use by setting
+ * `CLOCK_HF=cmuSelect_HFXO`. The same applies for `CLOCK_LFA`, `CLOCK_LFB` and
+ * `CLOCK_LFE` using `cmuSelect_LFXO`.
+ *
+ * If the internal RC-oscillator is not used, it will be disabled.
+ *
+ * Refer to the reference manual of the specific microcontroller for the
+ * specifics.
+ *
+ *
+ * EMU and CMU Configuration
+ * =========================
+ *
+ * The Energy Management Unit (EMU) and Clock Management Unit (CMU) are
+ * initialized using default values provided by the Gecko SDK. You can override
+ * any of the following defaults to use other values:
+ *
+ *   - `CMU_HFXOINIT`
+ *   - `CMU_LFXOINIT`
+ *   - `EMU_DCDCINIT`
+ *   - `EMU_EM23INIT`
+ *   - `EMU_EM4INIT`
+ *
+ * Refer to the Gecko SDK for more information about these values.
+ *
+ *
+ * Low-power Configuration
+ * =======================
+ *
+ * The EFM32/EFR32/EZR32 MCUs have support for low-power peripherals. Support
+ * is enabled by default, but can be disabled by setting LOW_POWER_ENABLED=0.
+ */
diff --git a/cpu/efm32/efm32-info.mk b/cpu/efm32/efm32-info.mk
new file mode 100644
index 0000000000000000000000000000000000000000..2d687b0ad3acbe81a41558b97e68aa3efbc8b5dd
--- /dev/null
+++ b/cpu/efm32/efm32-info.mk
@@ -0,0 +1,27 @@
+# Find the header file that should exist if the CPU is supported.
+EFM32_HEADER = $(wildcard $(RIOTCPU)/efm32/families/*/include/vendor/$(CPU_MODEL).h)
+
+ifeq (,$(EFM32_HEADER))
+  $(error Header file for $(CPU_MODEL) is missing)
+endif
+
+# Lookup up CPU information using grep.
+EFM32_INFO = $(shell grep $(CPU_MODEL) $(shell dirname $(EFM32_HEADER))/../../cpus.txt)
+
+ifeq (,$(EFM32_INFO))
+  $(error Unable to read CPU information for $(CPU_MODEL))
+endif
+
+# Export variables to use in this build.
+export EFM32_FAMILY = $(word 2, $(EFM32_INFO))
+export EFM32_SERIES = $(word 3, $(EFM32_INFO))
+export EFM32_ARCHITECTURE = $(word 4, $(EFM32_INFO))
+
+export EFM32_FLASH_START = $(word 5, $(EFM32_INFO))
+export EFM32_FLASH_SIZE = $(word 6, $(EFM32_INFO))
+export EFM32_SRAM_START = $(word 7, $(EFM32_INFO))
+export EFM32_SRAM_SIZE = $(word 8, $(EFM32_INFO))
+
+export EFM32_CRYPTO = $(word 9, $(EFM32_INFO))
+export EFM32_TRNG = $(word 10, $(EFM32_INFO))
+export EFM32_RADIO = $(word 11, $(EFM32_INFO))
diff --git a/cpu/efm32/families/efr32mg1p/Makefile b/cpu/efm32/families/efr32mg1p/Makefile
new file mode 100644
index 0000000000000000000000000000000000000000..adfea3236056121b6239f4d99a65295178884d1d
--- /dev/null
+++ b/cpu/efm32/families/efr32mg1p/Makefile
@@ -0,0 +1,6 @@
+MODULE = cpu
+
+# (file triggers compiler bug. see #5775)
+SRC_NOLTO += vectors.c
+
+include $(RIOTBASE)/Makefile.base
diff --git a/cpu/efm32/families/efr32mg1p/cpus.txt b/cpu/efm32/families/efr32mg1p/cpus.txt
new file mode 100644
index 0000000000000000000000000000000000000000..cd0bd8f7e7aec4e675ae899a54572d87550ff982
--- /dev/null
+++ b/cpu/efm32/families/efr32mg1p/cpus.txt
@@ -0,0 +1,27 @@
+# This file is automatically generated, and should not be changed. There is
+# propbably little reason to edit this file anyway, since it should already
+# contain all information for the EFR32MG1P family of CPUs.
+
+# The intended usage is to grep for the exact model name, and split by spaces
+# to get the required information.
+
+# CPU - Family - Series - Architecture - Flash base - Flash size - SRAM base - SRAM size - Crypto? - TRNG? - Radio?
+efr32mg1p632f256gm32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p132f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p233f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p132f256im32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p232f256im32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p133f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p232f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p732f256im32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p232f256gj43 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p232f256gm32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p231f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p732f256gm32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p232f256im48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p132f256im48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p632f256im32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p131f256gm48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p132f256gm32 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p233f256im48 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
+efr32mg1p132f256gj43 efr32mg1p 1 cortex-m4f 0x00000000 0x00040000 0x20000000 0x00007c00 1 0 1
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p132f256gm32.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p132f256gm32.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p132f256gm32.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p132f256gm32.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p132f256gm48.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p132f256gm48.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p132f256gm48.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p132f256gm48.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_acmp.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_acmp.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_acmp.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_acmp.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_adc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_adc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_adc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_adc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_af_pins.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_af_pins.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_af_pins.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_af_pins.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_af_ports.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_af_ports.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_af_ports.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_af_ports.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_cmu.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_cmu.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_cmu.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_cmu.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_cryotimer.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_cryotimer.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_cryotimer.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_cryotimer.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_crypto.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_crypto.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_crypto.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_crypto.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_devinfo.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_devinfo.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_devinfo.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_devinfo.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_dma_descriptor.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_dma_descriptor.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_dma_descriptor.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_dma_descriptor.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_dmareq.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_dmareq.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_dmareq.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_dmareq.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_emu.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_emu.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_emu.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_emu.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_fpueh.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_fpueh.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_fpueh.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_fpueh.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_gpcrc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpcrc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_gpcrc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpcrc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_gpio.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpio.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_gpio.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpio.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_gpio_p.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpio_p.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_gpio_p.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_gpio_p.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_i2c.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_i2c.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_i2c.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_i2c.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_idac.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_idac.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_idac.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_idac.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_ldma.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_ldma.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_ldma.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_ldma.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_ldma_ch.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_ldma_ch.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_ldma_ch.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_ldma_ch.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_letimer.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_letimer.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_letimer.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_letimer.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_leuart.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_leuart.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_leuart.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_leuart.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_msc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_msc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_msc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_msc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_pcnt.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_pcnt.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_pcnt.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_pcnt.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_prs.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_prs.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_prs_ch.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs_ch.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_prs_ch.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs_ch.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_prs_signals.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs_signals.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_prs_signals.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_prs_signals.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_rmu.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rmu.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_rmu.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rmu.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_romtable.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_romtable.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_romtable.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_romtable.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc_cc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc_cc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc_cc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc_cc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc_ret.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc_ret.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_rtcc_ret.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_rtcc_ret.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_timer.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_timer.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_timer.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_timer.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_timer_cc.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_timer_cc.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_timer_cc.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_timer_cc.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_usart.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_usart.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_usart.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_usart.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_wdog.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_wdog.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_wdog.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_wdog.h
diff --git a/cpu/efr32mg1p/include/vendor/efr32mg1p_wdog_pch.h b/cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_wdog_pch.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/efr32mg1p_wdog_pch.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/efr32mg1p_wdog_pch.h
diff --git a/cpu/efr32mg1p/include/vendor/em_device.h b/cpu/efm32/families/efr32mg1p/include/vendor/em_device.h
similarity index 65%
rename from cpu/efr32mg1p/include/vendor/em_device.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/em_device.h
index 10546dfa58f5c049fe57d94b51cd5c0b96e6b82b..ab163292cb9c5744431f5c731f6a2a9bad1b53ba 100644
--- a/cpu/efr32mg1p/include/vendor/em_device.h
+++ b/cpu/efm32/families/efr32mg1p/include/vendor/em_device.h
@@ -49,12 +49,63 @@ extern "C" {
 #ifndef EM_DEVICE_H
 #define EM_DEVICE_H
 
-#if defined(EFR32MG1P132F256GM48)
-#include "efr32mg1p132f256gm48.h"
+#if defined(EFR32MG1P131F256GM48)
+#include "efr32mg1p131f256gm48.h"
+
+#elif defined(EFR32MG1P132F256GJ43)
+#include "efr32mg1p132f256gj43.h"
 
 #elif defined(EFR32MG1P132F256GM32)
 #include "efr32mg1p132f256gm32.h"
 
+#elif defined(EFR32MG1P132F256GM48)
+#include "efr32mg1p132f256gm48.h"
+
+#elif defined(EFR32MG1P132F256IM32)
+#include "efr32mg1p132f256im32.h"
+
+#elif defined(EFR32MG1P132F256IM48)
+#include "efr32mg1p132f256im48.h"
+
+#elif defined(EFR32MG1P133F256GM48)
+#include "efr32mg1p133f256gm48.h"
+
+#elif defined(EFR32MG1P231F256GM48)
+#include "efr32mg1p231f256gm48.h"
+
+#elif defined(EFR32MG1P232F256GJ43)
+#include "efr32mg1p232f256gj43.h"
+
+#elif defined(EFR32MG1P232F256GM32)
+#include "efr32mg1p232f256gm32.h"
+
+#elif defined(EFR32MG1P232F256GM48)
+#include "efr32mg1p232f256gm48.h"
+
+#elif defined(EFR32MG1P232F256IM32)
+#include "efr32mg1p232f256im32.h"
+
+#elif defined(EFR32MG1P232F256IM48)
+#include "efr32mg1p232f256im48.h"
+
+#elif defined(EFR32MG1P233F256GM48)
+#include "efr32mg1p233f256gm48.h"
+
+#elif defined(EFR32MG1P233F256IM48)
+#include "efr32mg1p233f256im48.h"
+
+#elif defined(EFR32MG1P632F256GM32)
+#include "efr32mg1p632f256gm32.h"
+
+#elif defined(EFR32MG1P632F256IM32)
+#include "efr32mg1p632f256im32.h"
+
+#elif defined(EFR32MG1P732F256GM32)
+#include "efr32mg1p732f256gm32.h"
+
+#elif defined(EFR32MG1P732F256IM32)
+#include "efr32mg1p732f256im32.h"
+
 #else
 #error "em_device.h: PART NUMBER undefined"
 #endif
@@ -62,3 +113,4 @@ extern "C" {
 #ifdef __cplusplus
 }
 #endif
+
diff --git a/cpu/efr32mg1p/include/vendor/system_efr32mg1p.h b/cpu/efm32/families/efr32mg1p/include/vendor/system_efr32mg1p.h
similarity index 100%
rename from cpu/efr32mg1p/include/vendor/system_efr32mg1p.h
rename to cpu/efm32/families/efr32mg1p/include/vendor/system_efr32mg1p.h
diff --git a/cpu/efr32mg1p/system_efr32mg1p.c b/cpu/efm32/families/efr32mg1p/system.c
similarity index 100%
rename from cpu/efr32mg1p/system_efr32mg1p.c
rename to cpu/efm32/families/efr32mg1p/system.c
diff --git a/cpu/efr32mg1p/vectors.c b/cpu/efm32/families/efr32mg1p/vectors.c
similarity index 77%
rename from cpu/efr32mg1p/vectors.c
rename to cpu/efm32/families/efr32mg1p/vectors.c
index 79643a95b5a0032991d2174741706bb3520d9ee2..4389a2fcb7663466068d4977f1f72b00a6edaf9b 100644
--- a/cpu/efr32mg1p/vectors.c
+++ b/cpu/efm32/families/efr32mg1p/vectors.c
@@ -19,7 +19,6 @@
  * @}
  */
 
-#include <stdint.h>
 #include "vectors_cortexm.h"
 
 /* define a local dummy handler as it needs to be in the same compilation unit
@@ -31,7 +30,13 @@ void dummy_handler(void)
 
 /* Silicon Labs specific interrupt vector */
 WEAK_DEFAULT void isr_emu(void);
+WEAK_DEFAULT void isr_frc_pri(void);
 WEAK_DEFAULT void isr_wdog0(void);
+WEAK_DEFAULT void isr_frc(void);
+WEAK_DEFAULT void isr_modem(void);
+WEAK_DEFAULT void isr_rac_seq(void);
+WEAK_DEFAULT void isr_rac_rsm(void);
+WEAK_DEFAULT void isr_bufc(void);
 WEAK_DEFAULT void isr_ldma(void);
 WEAK_DEFAULT void isr_gpio_even(void);
 WEAK_DEFAULT void isr_timer0(void);
@@ -51,14 +56,24 @@ WEAK_DEFAULT void isr_cmu(void);
 WEAK_DEFAULT void isr_msc(void);
 WEAK_DEFAULT void isr_crypto(void);
 WEAK_DEFAULT void isr_letimer0(void);
+WEAK_DEFAULT void isr_agc(void);
+WEAK_DEFAULT void isr_protimer(void);
 WEAK_DEFAULT void isr_rtcc(void);
+WEAK_DEFAULT void isr_synth(void);
 WEAK_DEFAULT void isr_cryotimer(void);
+WEAK_DEFAULT void isr_rfsense(void);
 WEAK_DEFAULT void isr_fpueh(void);
 
 /* interrupt vector table */
 ISR_VECTOR(1) const isr_t vector_cpu[CPU_IRQ_NUMOF] = {
     [ 0] = isr_emu,                /* EMU */
+    [ 1] = isr_frc_pri,            /* FRC_PRI */
     [ 2] = isr_wdog0,              /* WDOG0 */
+    [ 3] = isr_frc,                /* FRC */
+    [ 4] = isr_modem,              /* MODEM */
+    [ 5] = isr_rac_seq,            /* RAC_SEQ */
+    [ 6] = isr_rac_rsm,            /* RAC_RSM */
+    [ 7] = isr_bufc,               /* BUFC */
     [ 8] = isr_ldma,               /* LDMA */
     [ 9] = isr_gpio_even,          /* GPIO_EVEN */
     [10] = isr_timer0,             /* TIMER0 */
@@ -78,7 +93,11 @@ ISR_VECTOR(1) const isr_t vector_cpu[CPU_IRQ_NUMOF] = {
     [24] = isr_msc,                /* MSC */
     [25] = isr_crypto,             /* CRYPTO */
     [26] = isr_letimer0,           /* LETIMER0 */
+    [27] = isr_agc,                /* AGC */
+    [28] = isr_protimer,           /* PROTIMER */
     [29] = isr_rtcc,               /* RTCC */
+    [30] = isr_synth,              /* SYNTH */
     [31] = isr_cryotimer,          /* CRYOTIMER */
+    [32] = isr_rfsense,            /* RFSENSE */
     [33] = isr_fpueh,              /* FPUEH */
 };
diff --git a/cpu/efr32mg1p/include/cpu_conf.h b/cpu/efm32/include/cpu_conf.h
similarity index 76%
rename from cpu/efr32mg1p/include/cpu_conf.h
rename to cpu/efm32/include/cpu_conf.h
index c28991616935824fec307bbfec377f5712ec9acd..1c8d4748e92a65917664186336c12e621231f700 100644
--- a/cpu/efr32mg1p/include/cpu_conf.h
+++ b/cpu/efm32/include/cpu_conf.h
@@ -7,9 +7,9 @@
  */
 
 /**
- * @defgroup    cpu_efr32mg1p Silicon Labs EFR32MG1P
+ * @defgroup    cpu_efm32 Silicon Labs EFM32/EFR32/EZR32
  * @ingroup     cpu
- * @brief       Support for the Silicon Labs EFR32MG1P CPU
+ * @brief       Support for Silicon Labs EFM32/EFR32/EZR32 CPUs
  * @{
  *
  * @file
@@ -31,12 +31,12 @@ extern "C" {
 #endif
 
 /**
- * @brief   ARM Cortex-M4 specific CPU configuration
+ * @brief   ARM Cortex-M specific CPU configuration
  * @{
  */
 #define CPU_DEFAULT_IRQ_PRIO            (1U)
-#define CPU_IRQ_NUMOF                   (FPUEH_IRQn + 1)
-#define CPU_FLASH_BASE                  FLASH_BASE
+#define CPU_IRQ_NUMOF                   (EXT_IRQ_COUNT + 1)
+#define CPU_FLASH_BASE                  (FLASH_BASE)
 /** @} */
 
 /**
diff --git a/cpu/efm32_common/include/periph_cpu.h b/cpu/efm32/include/periph_cpu.h
similarity index 99%
rename from cpu/efm32_common/include/periph_cpu.h
rename to cpu/efm32/include/periph_cpu.h
index dbfed9e58d620a3654fc97cb168d79f3c4dc409d..18c9d25b48949142a21882ba90486ad7cf75e95d 100644
--- a/cpu/efm32_common/include/periph_cpu.h
+++ b/cpu/efm32/include/periph_cpu.h
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @{
  *
  * @file
diff --git a/cpu/efr32mg1p/periph/Makefile b/cpu/efm32/periph/Makefile
similarity index 100%
rename from cpu/efr32mg1p/periph/Makefile
rename to cpu/efm32/periph/Makefile
diff --git a/cpu/efm32_common/periph/adc.c b/cpu/efm32/periph/adc.c
similarity index 98%
rename from cpu/efm32_common/periph/adc.c
rename to cpu/efm32/periph/adc.c
index b8cf8280f5698793caaef5f8f590809f99f962f0..f98ffac66148865ae841618318f028ddc4d2d5cd 100644
--- a/cpu/efm32_common/periph/adc.c
+++ b/cpu/efm32/periph/adc.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_adc
  * @{
  *
diff --git a/cpu/efm32_common/periph/cpuid.c b/cpu/efm32/periph/cpuid.c
similarity index 94%
rename from cpu/efm32_common/periph/cpuid.c
rename to cpu/efm32/periph/cpuid.c
index 8a9c81fcfb49574b130419f592f95c83f4c2fda3..05861a74102235d9275426e2af74d6aca46ab8b8 100644
--- a/cpu/efm32_common/periph/cpuid.c
+++ b/cpu/efm32/periph/cpuid.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_cpuid
  * @{
  *
diff --git a/cpu/efm32_common/periph/dac.c b/cpu/efm32/periph/dac.c
similarity index 98%
rename from cpu/efm32_common/periph/dac.c
rename to cpu/efm32/periph/dac.c
index ba7da549fe9daf0e975112d3bbb34ccdaf4752f9..cd7c7b73010cb3f7c6aa5ed3a0bbc7eebc6f437e 100644
--- a/cpu/efm32_common/periph/dac.c
+++ b/cpu/efm32/periph/dac.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_dac
  * @{
  *
diff --git a/cpu/efm32_common/periph/flashpage.c b/cpu/efm32/periph/flashpage.c
similarity index 96%
rename from cpu/efm32_common/periph/flashpage.c
rename to cpu/efm32/periph/flashpage.c
index 58ced472b9398d5d257b8c447b77a0ecded812c5..3209537f670d1bb019438f521b8ccc63b9abeaf0 100644
--- a/cpu/efm32_common/periph/flashpage.c
+++ b/cpu/efm32/periph/flashpage.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_flashpage
  * @{
  *
diff --git a/cpu/efm32_common/periph/gpio.c b/cpu/efm32/periph/gpio.c
similarity index 99%
rename from cpu/efm32_common/periph/gpio.c
rename to cpu/efm32/periph/gpio.c
index db8eb86fec01f27859081479085e23bab1029dab..0746bbb522af866bd5fa9999b0f2c87b6bba303e 100644
--- a/cpu/efm32_common/periph/gpio.c
+++ b/cpu/efm32/periph/gpio.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_gpio
  * @{
  *
diff --git a/cpu/efm32_common/periph/hwrng.c b/cpu/efm32/periph/hwrng.c
similarity index 97%
rename from cpu/efm32_common/periph/hwrng.c
rename to cpu/efm32/periph/hwrng.c
index 1d341096420bf7d8a9cb9d3b4c4e7096afaba816..aeb450d2bde2ee21e8e7bba3700168e95b269313 100644
--- a/cpu/efm32_common/periph/hwrng.c
+++ b/cpu/efm32/periph/hwrng.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_hwrng
  * @{
  *
diff --git a/cpu/efm32_common/periph/i2c.c b/cpu/efm32/periph/i2c.c
similarity index 99%
rename from cpu/efm32_common/periph/i2c.c
rename to cpu/efm32/periph/i2c.c
index d3a085b662e80fa67c7e85916db924695d369ca5..b1a5970fd696ed17efcdb616a89074e80c69f83d 100644
--- a/cpu/efm32_common/periph/i2c.c
+++ b/cpu/efm32/periph/i2c.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_i2c
  * @{
  *
diff --git a/cpu/efm32_common/periph/pm.c b/cpu/efm32/periph/pm.c
similarity index 96%
rename from cpu/efm32_common/periph/pm.c
rename to cpu/efm32/periph/pm.c
index 2cdac1f9a8b9e163c212a1a4678c36ea28448b57..f88c3ffd97196f9349459a39bdc24ead38e9493d 100644
--- a/cpu/efm32_common/periph/pm.c
+++ b/cpu/efm32/periph/pm.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_pm
  * @{
  *
diff --git a/cpu/efm32_common/periph/pwm.c b/cpu/efm32/periph/pwm.c
similarity index 98%
rename from cpu/efm32_common/periph/pwm.c
rename to cpu/efm32/periph/pwm.c
index 8b5ad350f3c644e135d9135b00a2958419bf87e0..80679e755e3feea24b6d1c5649654368cebbf08f 100644
--- a/cpu/efm32_common/periph/pwm.c
+++ b/cpu/efm32/periph/pwm.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_pwm
  * @{
  *
diff --git a/cpu/efm32_common/periph/rtc_series0.c b/cpu/efm32/periph/rtc_series0.c
similarity index 99%
rename from cpu/efm32_common/periph/rtc_series0.c
rename to cpu/efm32/periph/rtc_series0.c
index 5edf2dd1473f71c3593da4e228365074d346a424..ef75a7e675742efec4be12c44de9cd324e362b84 100644
--- a/cpu/efm32_common/periph/rtc_series0.c
+++ b/cpu/efm32/periph/rtc_series0.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_rtc
  * @{
  *
diff --git a/cpu/efm32_common/periph/rtc_series1.c b/cpu/efm32/periph/rtc_series1.c
similarity index 99%
rename from cpu/efm32_common/periph/rtc_series1.c
rename to cpu/efm32/periph/rtc_series1.c
index 7bb817d1abbeaa2ebfa3aeb822f04885362b66e9..d4938283ac3a878e97dcb66c1a6acb6842062e5b 100644
--- a/cpu/efm32_common/periph/rtc_series1.c
+++ b/cpu/efm32/periph/rtc_series1.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_rtc
  * @{
  *
diff --git a/cpu/efm32_common/periph/rtt_series0.c b/cpu/efm32/periph/rtt_series0.c
similarity index 98%
rename from cpu/efm32_common/periph/rtt_series0.c
rename to cpu/efm32/periph/rtt_series0.c
index c75951e31584516453f0012249e170c9e511d4bc..86b8846169f045eb0e190f7a1e92403bb09d3c55 100644
--- a/cpu/efm32_common/periph/rtt_series0.c
+++ b/cpu/efm32/periph/rtt_series0.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_rtt
  * @{
  *
diff --git a/cpu/efm32_common/periph/rtt_series1.c b/cpu/efm32/periph/rtt_series1.c
similarity index 99%
rename from cpu/efm32_common/periph/rtt_series1.c
rename to cpu/efm32/periph/rtt_series1.c
index f8fce5eddcee03fba4146db0d28c0e66c77eb0fa..c67e60b2cf262f83e176a66d2332289ced4263ec 100644
--- a/cpu/efm32_common/periph/rtt_series1.c
+++ b/cpu/efm32/periph/rtt_series1.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_rtt
  * @{
  *
diff --git a/cpu/efm32_common/periph/spi.c b/cpu/efm32/periph/spi.c
similarity index 98%
rename from cpu/efm32_common/periph/spi.c
rename to cpu/efm32/periph/spi.c
index d593566bd0125188bb307e0a94ab632993f7b26a..f0b75f9a17726943cf72f77159600574c9e66de3 100644
--- a/cpu/efm32_common/periph/spi.c
+++ b/cpu/efm32/periph/spi.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_spi
  * @{
  *
diff --git a/cpu/efm32_common/periph/timer.c b/cpu/efm32/periph/timer.c
similarity index 99%
rename from cpu/efm32_common/periph/timer.c
rename to cpu/efm32/periph/timer.c
index 2891ce5567e74338b020ffd7ef9fe755c85acd5b..2305eb5c3ebfa588712667e485e9394b01b0acfe 100644
--- a/cpu/efm32_common/periph/timer.c
+++ b/cpu/efm32/periph/timer.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_timer
  * @{
  *
diff --git a/cpu/efm32_common/periph/uart.c b/cpu/efm32/periph/uart.c
similarity index 99%
rename from cpu/efm32_common/periph/uart.c
rename to cpu/efm32/periph/uart.c
index f7ae6d615588ad75f888afc4fca14ce6a73d4e67..adaadf2142b2933600850291936829d531a7e05c 100644
--- a/cpu/efm32_common/periph/uart.c
+++ b/cpu/efm32/periph/uart.c
@@ -7,7 +7,7 @@
  */
 
 /**
- * @ingroup     cpu_efm32_common
+ * @ingroup     cpu_efm32
  * @ingroup     drivers_periph_uart
  * @{
  *
diff --git a/cpu/efm32_common/Makefile.include b/cpu/efm32_common/Makefile.include
deleted file mode 100644
index 5b233183a5356d58fc7a5ff6c9c9500392402cdb..0000000000000000000000000000000000000000
--- a/cpu/efm32_common/Makefile.include
+++ /dev/null
@@ -1,20 +0,0 @@
-# the em_device.h header requires a global define with the cpu model
-export CFLAGS += -D$(shell echo $(CPU_MODEL) | tr 'a-z' 'A-Z')
-
-# include emlib package
-USEPKG += emlib
-
-# include efm32 common
-USEMODULE += efm32_common
-
-# include common periph module
-USEMODULE += periph_common
-
-# include efm32 common periph drivers
-USEMODULE += efm32_common_periph
-
-# include layered power management
-USEMODULE += pm_layered
-
-# export the common include directory
-export INCLUDES += -I$(RIOTCPU)/efm32_common/include
diff --git a/cpu/efm32_common/doc.txt b/cpu/efm32_common/doc.txt
deleted file mode 100644
index ac02dada51ced9ccf56e39506bf17372369d4278..0000000000000000000000000000000000000000
--- a/cpu/efm32_common/doc.txt
+++ /dev/null
@@ -1,5 +0,0 @@
-/**
- * @defgroup    cpu_efm32_common Silicon Labs Exx32 MCU
- * @ingroup     cpu
- * @brief       Common implementations for the Exx32 family of CPUs
- */
diff --git a/cpu/efm32_common/periph/Makefile b/cpu/efm32_common/periph/Makefile
deleted file mode 100644
index eb60ec07dbaae45410b18e201b5e003f3786e85d..0000000000000000000000000000000000000000
--- a/cpu/efm32_common/periph/Makefile
+++ /dev/null
@@ -1,3 +0,0 @@
-MODULE = efm32_common_periph
-
-include $(RIOTMAKE)/periph.mk
diff --git a/cpu/efr32mg1p/Makefile b/cpu/efr32mg1p/Makefile
deleted file mode 100644
index 22730f62e175f457375834653d3eaaf9622bcc85..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/Makefile
+++ /dev/null
@@ -1,10 +0,0 @@
-# define the module that is build
-MODULE = cpu
-
-# add a list of subdirectories, that should also be build
-DIRS = periph $(RIOTCPU)/cortexm_common $(RIOTCPU)/efm32_common
-
-# (file triggers compiler bug. see #5775)
-SRC_NOLTO += vectors.c
-
-include $(RIOTBASE)/Makefile.base
diff --git a/cpu/efr32mg1p/Makefile.dep b/cpu/efr32mg1p/Makefile.dep
deleted file mode 100644
index 1515a5eab102634d4b913275da1352ac5ac3bd34..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/Makefile.dep
+++ /dev/null
@@ -1 +0,0 @@
-include $(RIOTCPU)/efm32_common/Makefile.dep
diff --git a/cpu/efr32mg1p/Makefile.features b/cpu/efr32mg1p/Makefile.features
deleted file mode 100644
index 389068b88106669b4a6919b51c98f6cad483788a..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/Makefile.features
+++ /dev/null
@@ -1,2 +0,0 @@
-
-include $(RIOTCPU)/efm32_common/Makefile.features
diff --git a/cpu/efr32mg1p/Makefile.include b/cpu/efr32mg1p/Makefile.include
deleted file mode 100644
index d2d38383ca4600b4011e7a4878e58313bb2a4c4a..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/Makefile.include
+++ /dev/null
@@ -1,12 +0,0 @@
-export CPU_ARCH = cortex-m4
-export CPU_FAM = efr32mg1p
-export CPU_SERIES = 1
-
-# include vendor device headers
-export INCLUDES += -I$(RIOTCPU)/efr32mg1p/include/vendor
-
-# include cortexm_common
-include $(RIOTMAKE)/arch/cortexm.inc.mk
-
-# include efm32_common
-include $(RIOTCPU)/efm32_common/Makefile.include
diff --git a/cpu/efr32mg1p/doc.txt b/cpu/efr32mg1p/doc.txt
deleted file mode 100644
index fcae1dfbfbf8288b62d3c9828a59159ad683837d..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/doc.txt
+++ /dev/null
@@ -1,10 +0,0 @@
-/**
- * @defgroup        cpu_efr32mg1p Silicon Labs EFR32MG1P
- * @ingroup         cpu
- * @brief           Implementation of Silicon Labs's EFR32MG1P MCU
- */
-
-/**
- * @defgroup        cpu_efr32mg1p_definitions Silicon Labs EFR32MG1P definitions
- * @ingroup         cpu_efr32mg1p
- */
diff --git a/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm32.ld b/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm32.ld
deleted file mode 100644
index 944d3a96184c33b57080538b26b8e70a414d8087..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm32.ld
+++ /dev/null
@@ -1,28 +0,0 @@
-/*
- * Copyright (C) 2015-2017 Freie Universität Berlin
- *
- * This file is subject to the terms and conditions of the GNU Lesser
- * General Public License v2.1. See the file LICENSE in the top level
- * directory for more details.
- */
-
-/**
- * @addtogroup      cpu_efr32mg1p
- * @{
- *
- * @file
- * @brief           Memory definitions for the EFR32MG1P132F256GM32 CPU
- *
- * @author          Hauke Petersen <hauke.petersen@fu-berlin.de>
- * @author          Bas Stottelaar <basstottelaar@gmail.com>
- *
- * @}
- */
-
-MEMORY
-{
-    rom (rx)    : ORIGIN = 0x00000000, LENGTH = 262144
-    ram (rwx)   : ORIGIN = 0x20000000, LENGTH = 31744
-}
-
-INCLUDE cortexm_base.ld
diff --git a/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm48.ld b/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm48.ld
deleted file mode 100644
index 99b6ee64d85ca4bf46d8002f1905eb1763c2477f..0000000000000000000000000000000000000000
--- a/cpu/efr32mg1p/ldscripts/efr32mg1p132f256gm48.ld
+++ /dev/null
@@ -1,28 +0,0 @@
-/*
- * Copyright (C) 2015-2017 Freie Universität Berlin
- *
- * This file is subject to the terms and conditions of the GNU Lesser
- * General Public License v2.1. See the file LICENSE in the top level
- * directory for more details.
- */
-
-/**
- * @addtogroup      cpu_efr32mg1p
- * @{
- *
- * @file
- * @brief           Memory definitions for the EFR32MG1P132F256GM48 CPU
- *
- * @author          Hauke Petersen <hauke.petersen@fu-berlin.de>
- * @author          Bas Stottelaar <basstottelaar@gmail.com>
- *
- * @}
- */
-
-MEMORY
-{
-    rom (rx)    : ORIGIN = 0x00000000, LENGTH = 262144
-    ram (rwx)   : ORIGIN = 0x20000000, LENGTH = 31744
-}
-
-INCLUDE cortexm_base.ld